w ww.sensirion.com version 4 C september 201 5 1 / 7 slg liquid flow meter series ultra high pressure flow sensor for lc applications ? ultra - low flow sensing in the sub - l /min range ? operating pressure up to 1 20 0 bar (17500 psi) ? 40 ms response time product summary interface options the slg liquid f low me ter enables precise, bi - directional measurements of dynamic liquid flow rates in the nl/min to low l/min range. this dev ice has been designed for ultra - high pressure applications in liquid chromatography systems (uhplc). excellent bio - compatibility and ch emical resistance is ensured by the use of fused silica, stainless steel and peek for all wetted parts. digital - i2c - bus - rs485 - bus - usb cable analog - voltage output (0 - 10 v) - additional operation modes for more information on communication, please refer to page 2 of this document. 1 sensing performance table 1 : model specific performance of sl g (all data for medium h 2 o , 23c) parameter slg - 0025 slg - 0075 slg - 0150 unit precision extended h 2 o full s cale f low r at e 1500 5000 20000 8000 n l/min h 2 o sensor o utput l imit a 1700 5500 2000/22000 b 10500 n l/min accuracy below full scale (whichever error is larger) 10 10 20 5 % of m.v. c 0.5 0 .5 n/a 0.5 % of full scale repeatability below full scale (whichever error is larger) 0.6 0.6 1.2 0.5 % of m.v. 0.06 0.0 3 n/a 0. 05 % of full scale temperature c oefficient (additional error / c; whichever is larger) 0.3 0.3 0.3 0. 15 % m.v. / c 0.03 0.0 3 n/a 0.0 15 % full scale / c mounting o rientation s ensitivity d - - - <0.4 % of full scale flow detection r esponse t ime ? 63 40 40 120 40 ms response t ime o n p ower - u p 120 ms operating t emperature +10+50 c ambient storage temperature e - 10+60 c operating p ressure 1200 (17500) 500 (7250) bar (psi) a flow rate at which the sensor output saturates . s ee section 2 for performance between full scale and saturation point b lower/upper limit c measured value d no depende nce on the mounting orientation for slg - 0025 and slg - 0075. slg - 0150: maximum additional offset when mounted vertically. e non - condensing, flow path empty
w ww.sensirion.com version 4 C september 201 5 2 / 7 1.1 precision/ext ended mode with the slg - 0075 the slg - 0075 is offering two different flow sensing modes. the precision mode allows for precise flow sensing starting at zero flow while the extended mode is made for a rough estimation of the current mass flow in higher flow ranges. the precision mode is fully bi - directional with continuous output at and around zero. the extended mode is uni - directional (positive flow direction only), and sensor output is restricted to the flow range between 2000 nl/min to 22000 nl/min. the ca libration for each mode is stored on a separate calibration field (cf): ? calibration field 0: precision mode (default) ? calibration field 1 : extended mode for switching between the two modes of operation the internal calibration field has to be selected ac cordingly. this can be done either by using the sensirion usb/rs485 viewer software or by specific digital commands (see additional documentation, available on request for either i 2 c or rs485 communication).
w ww.sensirion.com version 4 C september 201 5 3 / 7 2 specifications charts figure 1: flow meter accuracy and r epeatability across the flow range. relative error in % of measured value (left column) and absolute error in n l/min (right column) for h2o
w ww.sensirion.com version 4 C september 201 5 4 / 7 3 communication with the sensor the sl g flow meter shows bi directional, linear transfer characteristics. the produc t comes ful ly calibrated for water. digital sampling time, 16 bit 74 ms digital sampling time, 9 bit 1 ms 3.1 electrical specifications table 2 : dc characteristics parameter conditions min . typ. max. units power supply dc, vdd sensor only 4 5 6 v w. scc1 - rs485 4 5 6 v w. scc1 - analog 12 24 36 v operating current vdd = 4 - 6 v 5. 1 ma w. scc1 - rs485 20 70 ma w. scc1 - analog 4.3 ma 3.2 electrical connector and pinout the flow meter is equipped with a male connector type m8, 4 - pin, threaded lock according to i ec 61076 - 2 - 101 (ed. 1)/ iec 60947 - 5 - 2, and is compatible with sensirions scc1 interface cables. table 3: electrical pinout pin 1 sda (data) 2 gnd 3 vdd 4 scl (clock) 3.3 communication via usb cable the sensirion usb sensor cable provides an easy to u se usb interface for laboratory and desktop use. for further information please see the scc1 - usb sensor cable datasheet, available on www.sensirion.com/liquidflow - download . 3.4 digital communication via rs485 - bus the scc1 - rs485 sensor cable for flow sensors allows the communication via rs485 interface for use in a demanding industrial automation environment. in addition to the standard commands available in the i2c interface of the sensor, the incorpo rated microcontroller of the cable provides more complex logic such as a dispense volume totalizer, automatic dispense detection, automatic heater control and data buffer for asynchronous read - out. for further information please see the scc1 - rs485 sensor c able datasheet, available on www.sensirion.com/liquidflow - download . 3.5 analog communication the scc1 - analog sensor cable allows simple and quick readout of sensirions liquid flow meters by converti ng the digital sensor reading to a 0...10.5 v analog voltage output. additionally, a digital (high/low) output with two different modes of operation is available (flow switch / volume counter) . for further inf ormation please see the scc1 - analog sensor cabl e datasheet, available on www.sensirion.com/liquidflow - download . 3.6 digital communication via i2c - bus digital communication between a master and the sli sensor runs via the standard i2c - interface. t he physical interface consists of two bus lines, a data line (sda) and a clock line (scl) which need to be connected via pull - up resistors to the bus voltage of the system. these lines can be used on 3.3v or 5.0v level with a clock frequency of 100 khz. f or the detailed specifications of this i2c communication, please refer to specific i2c application notes from sensirion . table 4: i 2 c output characteristics parameter min. typ. max. units i 2 c bus clock frequency 100 khz output voltage low (sda/scl), i sink = 6ma 0.1 0.5 v low level output current (sda/scl) 6 ma high level input voltage (sda/scl) 2.0 v low level input voltage (sda/scl) 1.0 v
w ww.sensirion.com version 4 C september 201 5 5 / 7 4 fluidic connection table 5 : fluidic specifications parameter slg - 0025 slg - 0075 slg - 0150 wetted ma terials: ? internal sensor tube material fused silica ? fitting material stainless steel ? sealing material peek fluid connector ports (fittings) stainless steel 10 - 32 coned port for 1/16 od tubing upchurch u - 435, nanoviper? compatible pressure drop (at full scale flow rate, h 2 o, 23c) 2 bar 100 mbar 10 mbar total internal volume 100 nl 350 nl 1200 nl for more information on the fluidic connection please find: application note sensor ports and tubing connections in the download center on our webpage ( www.sensirion.com/liquidflow - download ) . 5 mechanical specifications table 6 : mechanical specifications parameter slg - 0025 slg - 0075 slg - 0150 largest dimensions 80 x 30 x 20 mm total mass 150 g inner diameter d 25 m 75 m 150 m protection class ip 53 all dimensions in mm 2x upchurch u435 thread 10 - 32 slg - 0025 / slg - 0075 / slg - 0 150 m8 4 - pin
w ww.sensirion.com version 4 C september 201 5 6 / 7 ordering information for oem applications, the flow meter can be purchased in larger quantities without any additional parts. for optimum performance, sensirion re commends using the slg flow meter s in combination with the scc1 interface cables. for laboratory use and technology evaluation, the flow meter kit slg - x xxx can be ordered. this laboratory - package contains: ? liquid flow meter slg - 0 x xx ? fitting material for u hp fittings ? pc softw are (viewer & data export tool) ? scc1 - usb sensor cable with usb connector for plug - and - play connection to a pc ? scc1 - analog sensor cable with 0 - 10 v voltage output. table 7 : ordering information product article number slg - 0025 uhplc li quid flow meter 1 - 101316 - 01 slg - 0075 uhplc liquid flow meter 1 - 100592 - 02 slg - 0150 liquid flow meter 1 - 101374 - 01 flow meter kit sl g - 0025 1 - 1013 34 - 01 flow meter kit sl g - 0075 1 - 100896 - 0 2 flow meter kit sl g - 0150 1 - 101389 - 01 interface cables: scc1 - rs485 sensor cable pigtail 2m 1 - 100804 - 01 scc1 - rs485 sensor cable pigtail 5m 1 - 101122 - 01 scc1 - analog sensor cable pigtail 2m 1 - 101072 - 01 scc1 - analog sensor cable pigtail 10m 1 - 101 219 - 01 scc1 - usb sensor cable 2m 1 - 101007 - 01
w ww.sensirion.com version 4 C september 201 5 7 / 7 important notices warning, per sonal injury do not use this product as safety or emergency stop devices or in any other application where failure of the product could result in personal injury (including death). do not use this product for applications other than its intended and author ized use. before installing, handling, using or servicing this product, please consult the datasheet and application notes. failure to comply with these instructions could result in death or serious injury. if the buyer shall purchase or use sensirion prod ucts for any unintended or unauthorized application, buyer shall defend, indemnify and hold harmless sensirion and its officers, employees, subsidiaries, affiliates and distributors against all claims, costs, damages and expenses, and reasonable attorney f ees arising out of, directly or indirectly, any claim of personal injury or death associated with such unintended or unauthorized use, even if sensirion shall be allegedly negligent with respect to the design or the manufacture of the product. esd precauti ons the inherent design of this component causes it to be sensitive to electrostatic discharge (esd). to prevent esd - induced damage and/or degradation, take customary and statutory esd precautions when handling this product. warranty sensirion warrants sol ely to the original purchaser of this product for a period of 12 months (one year) from the date of delivery that this product shall be of the quality, material and workmanship defined in sensirions published specifications of the product. within such per iod, if proven to be defective, sensirion shall repair and/or replace this product, in sensirions discretion, free of charge to the buyer, provided that: ? notice in writing describing the defects shall be given to sensirion within fourteen (14) days after their appearance; ? such defects shall be found, to sensirions reasonable satisfaction, to have arisen from sensirions faulty design, material, or workmanship; ? the defective product shall be returned to sensirions factory at the buyers expense; and ? the warranty period for any repaired or replaced product shall be limited to the unexpired portion of the original period. this warranty does not apply to any equipment which has not been installed and used within the specifications recommended by sensirion f or the intended and proper use of the equipment. except for the warranties expressly set forth herein, sensirion makes no warranties, either express or implied, with respect to the product. any and all warranties, including without limitation, warranties o f merchantability or fitness for a particular purpose, are expressly excluded and declined. sensirion is only liable for defects of this product arising under the conditions of operation provided for in the datasheet and proper use of the goods. sensirion explicitly disclaims all warranties, express or implied, for any period during which the goods are operated or stored not in accordance with the technical specifications. sensirion does not assume any liability arising out of any application or use of any product or circuit and specifically disclaims any and all liability, including without limitation consequential or incidental damages. all operating parameters, including without limitation recommended parameters, must be validated for each customers appl ications by customers technical experts. recommended parameters can and do vary in different applications. sensirion reserves the right, without further notice, (i) to change the product specifications and/or the information in this document and (ii) to i mprove reliability, functions and design of this product. copyright ? 2001 - 2015, sensirion. cmosens ? is a trademark of sensirion all rights reserved ce, rohs, reach and weee statement the flow meters of the sl g s eries comply with requirements of the follow ing directives and regulations: ? the device fully complies with norm en 50081 - 2 (emission test series), en 50082 - 2 (immunity test series) and esd protection when used in combination with the scc1 - rs485 or scc1 - analog sensor cables. ? eu directive 1907/2006/ ec concerning registration, evaluation, authorization and restriction of chemicals (reach) ? eu directive 2002/96/ec on waste electrical and electronic equipment (weee), oj13.02.2003; esp. its article 6 (1) with annex ii. ? eu directive 2002/65/ec on the restr iction of certain hazardous substances in electric and electronic equipment (rohs), oj01.01.2011 headquarters and subsidiaries sensirion ag laubisruetistr. 50 ch - 8712 staefa zh switzerland phone: +41 44 306 40 00 fax: +41 44 306 40 30 info@sensirion.com www.sensirion.com sensirion inc., usa phone: +1 805 409 4900 info_us@sensirion.com www. sensirion.com sensirion japan co. ltd. phone: +81 3 3444 4940 info@sensirion.co.jp www.sensirion.co.jp sensirion korea co. ltd. phone: +82 31 345 0031 3 info@sensirion.co.kr www.sensirion.co.kr sensirion china co. ltd. phone: +86 755 8252 1501 info@sensirion.com.cn www.sensirion.com .cn sensirion ag (germany) phone: +41 44 927 11 66 info@sensirion.com www.sensirion.com to find your local representative, please visit www.sensirion.com/contact
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