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 DATASHEET
Lighting
Imaging
Telecom
Mercury Short Arc Lamps
HSH2510NIL0 Lamps for Photolithography
Description
PerkinElmer Optoelectronics is a leading manufacturer of mercury short arc lamps ranging in output power from 1000 to 8000 watts. These lamps are used in the production of printed circuit boards, liquid crystal displays and semiconductors. The HSH Series lamps are used worldwide in microlithography systems manufactured by ASML, Canon, GCA, Nikon, Karl Suss, Ultratech Stepper, and SVG. With extremely high stability, uniform output distribution and extended lamp lifetimes, the HSH Series has become the lamp choice of many of the world's leading semiconductor manufacturers. PerkinElmer has been a leading manufacturer of high intensity arc lamps for more than 30 years and is a premier lamp supplier for solid state lasers, medical equipment, NASA space systems and microlithography. PerkinElmer has steadily advanced lamp performance from 1000 watts to 8000 watts. With the introduction of new materials and proprietary manufacturing processes, we have extended lamp lifetimes from several hundred hours to more than two thousand hours. The HSH Series provides longer lifetimes, outstanding uniformity, and excellent spectral quality which results in increased throughput, reduced downtime and an overall reduction in the cost of ownership.
Applications
* Microlithography
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www.perkinelmer.com/opto
HSH2510NILO
Operational Specifications
Description Power Current Voltage Current Ripple Temperature (at base) Lifetime Nominal 2500 watts 109 amps (DC) 23 volts (DC) 3% 220C (max) 1500 hours 96.2-125 amps (DC) 20-26 volts (DC) Range
Physical Specifications
Description Arc Gap Anode Base Cathode Base Specification 4.5 mm (max) 33.5 mm Dia and Cable 33.5 mm Dia (M14-P1.5)
Spectral Output
100 90
Dimensions
Relative Intensity (%)
80 70 60 50 40 30 20 10 0 250 300 350 400 450 500 550 600 650 700 750
ANODE (+) END UP
O76 MAX
Wavelength (nm)
Typical Performance Graph
100
325
90
Relative Intensity (%)
351 MAX
80 70 60 50 40 30 20 10 0 0 300 600 900 1200 1500
160
CATHODE (-) END DOWN
All dimensions are in millimeters.
Hours of Operation
Notes 1. Lamp must be operated with anode end up and cathode end down. Inclination of lamp axis to vertical must not exceed 10.
Part Number References Used In Replaces Nikon NSR-2205 i14E SUV2510NIL HBO2510W/NIL
PerkinElmer welcomes inquiries about special lamps. We would be pleased to discuss the requirements of your application and the feasibility of designing a lamp specifically suited to your needs. For more information e-mail us at opto@perkinelmer.com or visit our web site at www.perkinelmer.com/opto. All values are nominal; specifications subject to change without notice.
USA: PerkinElmer Optoelectronics 44370 Christy St. Fremont, CA 94538 Phone: (510) 979-6500 Fax: (510) 687-1140 Europe: PerkinElmer Optoelectronics GmbH Wenzel-Jaksch-Str. 31 65199 Wiesbaden Germany Phone: +49 611 492 0 Fax: +49 611 492 177 Asia: PerkinElmer Optoelectronics 47 Ayer Rajah Crescent #06-12 Singapore 139947 Phone: +65 775 2022 Fax: +65 775 1008
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(c) 2000 PerkinElmer inc. All rights reserved.
DS-192 Rev C 1101
www.perkinelmer.com/opto


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