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MOTOROLA
SEMICONDUCTOR TECHNICAL DATA
Order this document by MPX906/D
6 kPa Water Vapor Compatible Uncompensated Silicon Pressure Sensors
The MPX906D series device is a silicon piezoresistive pressure sensor providing a very accurate and linear voltage output -- directly proportional to the applied pressure. This standard, low cost, uncompensated pressure sensor permits manufacturers to design and add their own external temperature compensating and signal conditioning networks. Compensation techniques are simplified because of the predictability of Motorola's single element strain gauge design. It is designed for applications exposing the pressure (P2) side of the device to water, water vapor and soapy water vapor. Features * Low Cost * Patented Silicon Shear Stress Strain Gauge Design * Ratiometric to Supply Voltage * Durable Epoxy Unibody Element * Water Vapor Compatible -- 0 to 600 mmH20 Figure 1 shows a schematic of the internal circuitry on the stand-alone pressure sensor chip.
PIN 4 + VS PIN 5 + Vout X-ducer PIN 3 - Vout PIN 2
MPX906 SERIES
0 to 6 kPa (0 to 24 in. H2O) WATER VAPOR COMPATIBLE 20 mV FULL SCALE SPAN (TYPICAL)
BASIC CHIP CARRIER ELEMENT CASE 867-08, STYLE 2
PORT OPTION CASE 867H-03, STYLE 2 NOTE: Pin 1 is the notched pin.
Figure 1. MPX906 Pressure Sensor Schematic
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PIN NUMBER
N/C Gnd -Vout 4 5 6 VS +Vout N/C 2 3
VOLTAGE OUTPUT versus APPLIED DIFFERENTIAL PRESSURE The differential voltage output of the X-ducer is directly proportional to the differential pressure applied. The output voltage of the sensor increases with increasing pressure applied to the (P2) side relative to the pressure side (P1). MAXIMUM RATINGS (TC = 25C unless otherwise noted)
Rating Overpressure(8) (P1 > P2) Overpressure(8) (P2 > P1) Storage Temperature Operating Temperature Symbol Pmax1 Pmax2 Tstg TA Value 10 100 - 40 to +125 - 40 to +125 Unit kPa kPa C C
Senseon and X-ducer are trademarks of Motorola, Inc. REV 2
Motorola Sensor Device Data (c) Motorola, Inc. 1997
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MPX906 SERIES
OPERATING CHARACTERISTICS (VS = 3.0 Vdc, TA = 25C unless otherwise noted)
Characteristic Pressure Range(1) Supply Voltage(2) Supply Current Full Scale Span(3) Offset(4) Sensitivity Linearity(5) Pressure Hysteresis (0 to 6 kPa) (5) Temperature Hysteresis (0C to +85C) (5) Temperature Coefficient of Full Scale Span(5) Temperature Coefficient of Offset(5) Temperature Coefficient of Resistance(5) Input Impedance Output Impedance Response Time (10% to 90%) (6) Warm-Up Offset Stability(9) Symbol POP VS Io VFSS Voff V/P -- -- -- TCVFSS TCVoff TCR Zin Zout tR -- -- Min 0 -- -- 9.0 - 40 -- -0.5 -- -- - 0.22 -- 0.25 400 750 -- -- -- Typ -- 3.0 6.0 20 -20 3.3 -- 0.1 0.5 -- - 18 0.30 -- -- 1.0 20 0.5 Max 6.0 6.0 -- 32 0 -- 2.0 -- -- - 0.16 -- 0.35 550 1875 -- -- -- Unit kPa Vdc mAdc mV mV mV/kPa %VFSS %VFSS %VFSS %VFSS/C V/C %Zin/C ms ms %VFSS
MECHANICAL CHARACTERISTICS
Characteristic Weight (Basic Element, Case 867-08) Symbol -- Min -- Typ 4.0 Max -- Unit Grams
NOTES: 1. 1.0 kPa (kiloPascal) equals 0.145 psi. 2. Device is ratiometric within this specified excitation range. Operating the device above the specified excitation range may induce additional error due to device self-heating. 3. Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the minimum rated pressure. 4. Offset (Voff) is defined as the output voltage at the minimum rated pressure. 5. Accuracy (error budget) consists of the following: * Linearity: Output deviation from a straight line relationship with pressure, using end point method, over the specified pressure range. * Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is cycled to and from the minimum or maximum operating temperature points, with zero differential pressure applied. * Pressure Hysteresis: Output deviation at any pressure within the specified range, when this pressure is cycled to and from the minimum or maximum rated pressure, at 25C. * TcSpan: Output deviation at full rated pressure over the temperature range of 0 to 85C, relative to 25C. * TcOffset: Output deviation with minimum rated pressure applied, over the temperature range of 0 to 85C, relative to 25C. * TCR: Zin deviation with minimum rated pressure applied, over the temperature range of - 40C to +125C, relative to 25C. 6. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to a specified step change in pressure. 7. Common mode pressures beyond specified may result in leakage at the case-to-lead interface. 8. Exposure beyond these limits may cause permanent damage or degradation to the device. 9. Offset stability is the product's output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test.
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Motorola Sensor Device Data
MPX906 SERIES
TEMPERATURE COMPENSATION Figure 2 shows the output characteristics of the MPX906D series at 25C. The X-ducer piezoresistive pressure sensor element is a semiconductor device which gives an electrical output signal proportional to the pressure applied to the device. This device uses a unique transverse voltage diffused semiconductor strain gauge which is sensitive to stresses produced in a thin silicon diaphragm by the applied pressure. Because this strain gauge is an integral part of the silicon diaphragm, there are no temperature effects due to differences in the thermal expansion of the strain gauge and the diaphragm, as are often encountered in bonded strain gauge pressure sensors. However, the properties of the strain gauge itself are temperature dependent, requiring that the device be temperature compensated if it is to be used over an extensive temperature range. Temperature compensation and offset calibration can be achieved rather simply with additional resistive components. Several approaches to external temperature compensation over both - 40 to +125C and 0 to + 80C ranges are presented in Motorola Applications Note AN840. LINEARITY Linearity refers to how well a transducer's output follows the equation: Vout = Voff + sensitivity x P over the operating pressure range (Figure 3). There are two basic methods for calculating nonlinearity: (1) end point straight line fit or (2) a least squares best line fit. While a least squares fit gives the "best case" linearity error (lower numerical value), the calculations required are burdensome. Conversely, an end point fit will give the "worst case" error (often more desirable in error budget calculations) and the calculations are more straightforward for the user. Motorola's specified pressure sensor linearities are based on the end point straight line method measured at the midrange pressure.
5 0 OUTPUT (mVdc) -5 -10 -15 -20 -25 85C VS = 3 Vdc P2 > P1 25C 0C OUTPUT (mVdc)
70 60 50 ACTUAL 40 30 20 10 0 100 200 300 400 500 PRESSURE DIFFERENTIAL (mmH20) 600 0 PRESSURE (kPA) THEORETICAL OFFSET (VOFF) MAX POP SPAN (VFSS) LINEARITY
0
Figure 2. Output versus Pressure Differential
Figure 3. Linearity Specification Comparison
SILICONE DIE COAT WIRE BOND
DIE
AMBIENT (P1) SIDE STAINLESS STEEL METAL COVER P1 EPOXY CASE
LEAD FRAME
Figure 4. Cross-Sectional Diagram (not to scale)
Motorola Sensor Device Data
EEEEEEEEEEE EEEEEEEEEEE EEEEEEEEEEE EEEEEEEEEEE EEEEEEEEEEE
P2
RTV DIE BOND PRESSURE (P2) SIDE
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MPX906 SERIES
SOAPY WATER VAPOR COMPATIBILITY The compatibility of this product to Soapy Water Vapor has been verified by the reliability sample test method shown in Figure 5. Samples were tested with bias for 504 hours and evaluated to specification after completion of this vapor exposure. Contact factory for details on liquid exposure compatibility testing.
DUT TEST SYSTEM MANIFOLD Port VAPORS TA = 75C MEDIA LIQUID Test Conditions: TA = 75C Vsupply = 6 Volts Solution: 25 grams detergent and 50 milliliters bleach per liter of Phoenix tap water. Detergent and bleach brand names selected per UL specification #UL2157 Electric Clothes Washing Machines and Extractors Devices exposed to vapors 5 cm above liquid.
Figure 5. Vapor Test Method
ORDERING INFORMATION MPX906D series pressure sensors are available in basic element or ported configurations, which provide printed circuit board mounting ease and barbed hose pressure connections.
MPX Series Device Type DiT Basic Element Ported Element Options Oi Differential Gauge Axial Case Type C T Case 867-08 Case 867H-03 Order Number MPX906D MPX906GVW Device Marking MPX906D MPX906D
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Motorola Sensor Device Data
MPX906 SERIES
PACKAGE DIMENSIONS
C R M B -A- N
PIN 1 SEATING PLANE
1 2 3 4 5 6
POSITIVE PRESSURE (P1)
NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH. 3. DIMENSION -A- IS INCLUSIVE OF THE MOLD STOP RING. MOLD STOP RING NOT TO EXCEED 16.00 (0.630). INCHES MIN MAX 0.595 0.630 0.514 0.534 0.200 0.220 0.027 0.033 0.048 0.064 0.100 BSC 0.014 0.016 0.695 0.725 30 _NOM 0.475 0.495 0.430 0.450 0.090 0.105 STYLE 2: PIN 1. 2. 3. 4. 5. 6. MILLIMETERS MIN MAX 15.11 16.00 13.06 13.56 5.08 5.59 0.68 0.84 1.22 1.63 2.54 BSC 0.36 0.40 17.65 18.42 30 _NOM 12.07 12.57 10.92 11.43 2.29 2.66
L
-T- G F D 6 PL 0.136 (0.005)
M
J S
TA
M
DIM A B C D F G J L M N R S
CASE 867-08 ISSUE N
OPEN GROUND -VOUT VSUPPLY +VOUT OPEN
BASIC ELEMENT
-T- C E V Y N R
PIN 1 POSITIVE PRESSURE (P1) 1 2 3 4 5 6 NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH
A U
-Q-
B
Z X J
-P- 0.25 (0.010)
M
S TQ
M
K
0.13 (0.005)
M
TP
D 6 PL S QS F
G
DIM A B C D E F G J K N P Q R S U V X Y Z
INCHES MIN MAX 1.080 1.120 0.740 0.760 0.800 0.830 0.027 0.033 0.160 0.180 0.048 0.064 0.100 BSC 0.014 0.016 0.220 0.240 0.070 0.080 0.150 0.160 0.150 0.160 0.440 0.460 0.695 0.725 0.840 0.860 0.206 0.226 0.370 0.390 0.240 0.260 0.106 0.126 STYLE 2: PIN 1. 2. 3. 4. 5. 6.
MILLIMETERS MIN MAX 27.43 28.45 18.80 19.30 20.32 21.08 0.68 0.84 4.06 4.57 1.22 1.63 2.54 BSC 0.36 0.41 5.59 6.10 1.78 2.03 3.81 4.06 3.81 4.06 11.18 11.68 17.65 18.42 21.34 21.84 5.23 5.74 9.40 9.91 6.10 6.60 2.69 3.20
CASE 867H-03 ISSUE B
NO CONNECT GROUND MINUS V OUT VSUPPLY PLUS V OUT NO CONNECT
Motorola Sensor Device Data
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MPX906 SERIES
Motorola reserves the right to make changes without further notice to any products herein. Motorola makes no warranty, representation or guarantee regarding the suitability of its products for any particular purpose, nor does Motorola assume any liability arising out of the application or use of any product or circuit, and specifically disclaims any and all liability, including without limitation consequential or incidental damages. "Typical" parameters which may be provided in Motorola data sheets and/or specifications can and do vary in different applications and actual performance may vary over time. All operating parameters, including "Typicals" must be validated for each customer application by customer's technical experts. Motorola does not convey any license under its patent rights nor the rights of others. Motorola products are not designed, intended, or authorized for use as components in systems intended for surgical implant into the body, or other applications intended to support or sustain life, or for any other application in which the failure of the Motorola product could create a situation where personal injury or death may occur. Should Buyer purchase or use Motorola products for any such unintended or unauthorized application, Buyer shall indemnify and hold Motorola and its officers, employees, subsidiaries, affiliates, and distributors harmless against all claims, costs, damages, and expenses, and reasonable attorney fees arising out of, directly or indirectly, any claim of personal injury or death associated with such unintended or unauthorized use, even if such claim alleges that Motorola was negligent regarding the design or manufacture of the part. Motorola and are registered trademarks of Motorola, Inc. Motorola, Inc. is an Equal Opportunity/Affirmative Action Employer. Mfax is a trademark of Motorola, Inc. How to reach us: USA / EUROPE / Locations Not Listed: Motorola Literature Distribution; P.O. Box 5405, Denver, Colorado 80217. 303-675-2140 or 1-800-441-2447 JAPAN: Nippon Motorola Ltd.; Tatsumi-SPD-JLDC, 6F Seibu-Butsuryu-Center, 3-14-2 Tatsumi Koto-Ku, Tokyo 135, Japan. 81-3-3521-8315
MfaxTM: RMFAX0@email.sps.mot.com - TOUCHTONE 602-244-6609 ASIA/PACIFIC: Motorola Semiconductors H.K. Ltd.; 8B Tai Ping Industrial Park, - US & Canada ONLY 1-800-774-1848 51 Ting Kok Road, Tai Po, N.T., Hong Kong. 852-26629298 INTERNET: http://motorola.com/sps
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MPX906/D Motorola Sensor Device Data

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